[B-3-1] A Triple-Level Interconnection Technology for High Speed 16 Kb GaAs SRAM

M. Noda、S. Matsue、M. Sakai、K. Sumitani、H. Nakano、T. Oku、H. Makino、K. Nishitani、M. Otsubo (1.Optoelectronic and Microwave Devices R & D Lab.、2.LSI R & D Lab. Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1990.B-3-1