[C-4-1] Novel Selective Platinum Deposition on VLSI Contact Hole

J. B. Yeh, C. Y. Chang, J. W. Chou, K. F. Huang, M. S. Feng (1.Institute of Electronics, National Chiao Tung University)

https://doi.org/10.7567/SSDM.1990.C-4-1