[C-7-5] In-situ Multiprocessing ULSI Manufacturing Technology by RTP-CVD

T. Y. Hsieh, K. H. Jung, W. Ting, D. L. Kwong (1.Microelectronics Research Center Department of Electrical and Computer Engineering The University of Texas at Austin)

https://doi.org/10.7567/SSDM.1990.C-7-5