[C-9-2] High Mobility Poly-Si Thin Film Transistor Fabricated in Avalanche-Nucleated Amorphous Si

M. Ohkura、M. Moniwa、K. Kusukawa、M. Miyao (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1990.C-9-2