[LN-SE-2] A 5 nm Thick Ultra-Thin Double-Gated Poly Si TFT Using Si2H6 as a Source Gas

T. Ueda, H. Komiya, T. Ashida, R. Miyake (1.IC GROUP, SHARP CORPORATION)

https://doi.org/10.7567/SSDM.1990.LN-SE-2