[S-CII-4] Fabrication of Storage Capacitance-Enhanced Capacitors with a Rough Electrode

Yoshio Hayashide, Hiroshi Miyatake, Junichi Mitsuhashi, Makoto Hirayama, Takashi Higaki, Haruhiko Abe (1.LSI R&D Lab. Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1990.S-CII-4