[S-E-5] High Mobility Poly-Si TFTs Using Solid Phase Crystallized a-Si Films Deposited by Plasma Enhanced Chemical Vapor Deposition

Satoshi Takenaka, Masafumi Kunii, Hideaki Oka, Hajime Kurihara (1.Research & Development Division Seiko Epson Corporation)

https://doi.org/10.7567/SSDM.1990.S-E-5