[S-E-6] Low Temperature Poly-Si TFT's with Various Source/Drain Processing Techniques

H. Pattyn, K. Baert, P. Debenest, M. Heyns, M. Schaekers, J. Nijs, R. Mertens (1.Interuniversity Micro Electronics Centre (IMEC))

https://doi.org/10.7567/SSDM.1990.S-E-6