[S-E-6] Low Temperature Poly-Si TFT's with Various Source/Drain Processing Techniques

H. Pattyn、K. Baert、P. Debenest、M. Heyns、M. Schaekers、J. Nijs、R. Mertens (1.Interuniversity Micro Electronics Centre (IMEC))

https://doi.org/10.7567/SSDM.1990.S-E-6