[S-F-10] HF Surface Passivation Failure in Integrated Thermal Oxidation Processing

M. Liehr, M. Offenberg, S. R. Kasi, G. W. Rubloff, K. Holloway (1.IBM Research Division, T. J. Watson Research Center)

https://doi.org/10.7567/SSDM.1990.S-F-10