[S-F-10] HF Surface Passivation Failure in Integrated Thermal Oxidation Processing

M. Liehr、M. Offenberg、S. R. Kasi、G. W. Rubloff、K. Holloway (1.IBM Research Division, T. J. Watson Research Center)

https://doi.org/10.7567/SSDM.1990.S-F-10