[A-2-2] A Comparative Study of High-Field Endurance for Reoxidized-Nitrided and Fluorinated Oxides

Z. H. Liu, P. Nee, P. K. Ko, C. Hu, C. G. Sodini, B. J. Gross, T. P. Ma, Y. C. Cheng (1.Department of EECS, University of California, 2.Department of EECS, Massachusetts Institute of Technology, 3.Department of Electrical Engineering, Yale University, 4.Directorate, City Polytechnic of Hong Kong)

https://doi.org/10.7567/SSDM.1991.A-2-2