[A-2-3] Investigation of the Atomic Structure of the SiO2/Si(111) Interface by MEIS (Medium-Energy Ion Scattering)

T. NISHIOKA、Y. SHINODA、C. HEIMLICH、Y. KOBAYASHI、H. HIBINO、K. SUGII (1.NTT Basic Research Laboratories)

https://doi.org/10.7567/SSDM.1991.A-2-3