Interaction of Pd with Strained Layers of Si1-xGex Epitaxially Grown on Si(100)

A. Buxbaum; M. Eizenberg; A. Raizman; F. Schaffler

doi:https://doi.org/10.7567/SSDM.1991.A-4-3

[A-4-3] Interaction of Pd with Strained Layers of Si1-xGex Epitaxially Grown on Si(100)

A. Buxbaum, M. Eizenberg, A. Raizman, F. Schaffler (1.Dept. of Materials Engineering and Solid State Institute, Technion, 2.Soreq Nuclear Research Center, 3.Daimler - Benz AG, Forschungsinstitut Ulm)

https://doi.org/10.7567/SSDM.1991.A-4-3

1991 International Conference on Solid State Devices and Materials

[A-4-3] Interaction of Pd with Strained Layers of Si1-xGex Epitaxially Grown on Si(100)