[B-2-2] Proximity Gettering of Micro-Defects by High Energy Ion Implantation

T. Kuroi, S. Komori, K. Fukumoto, Y. Mashiko, K. Tsukamoto, Y. Akasaka (1.LSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1991.B-2-2