[B-2-2] Proximity Gettering of Micro-Defects by High Energy Ion Implantation

T. Kuroi、S. Komori、K. Fukumoto、Y. Mashiko、K. Tsukamoto、Y. Akasaka (1.LSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1991.B-2-2