[B-2-4] The Effects of Hot Ion-Implantation on the Electrical Properties of Amorphous-Silicon Films Produced by CVD Method
Tsutomu SATOH、Hiroshi KANOH、Osamu SUGIURA、Masakiyo MATSUMURA
(1.Department of Physical Electronics, Tokyo Institute of Technology)
https://doi.org/10.7567/SSDM.1991.B-2-4