[LD-8-8] A Novel Atomic-Layer Epitaxy (TM-ALE) Method of Silicon

Shigeru IMAI、Satoru TAKAGI、Osamu SUGIURA、Masakiyo MATSUMURA (1.Department of Physical Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1991.LD-8-8