[PB1-2] Structure and Properties of Silicon Titanium Oxide Films Prepared by Plasma CVD Method

Takeshi KAMADA、Masatoshi KITAGAWA、Munehiro SHIBUYA、Takashi HIRAO (1.Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1991.PB1-2