[PB1-3] Contact Plug Formed with Chemical-Vapour-Deposited TiN

K. Mori、M. Akazawa、M. Iwasaki、H. Ito、K. Tsukamoto、Y. Akasaka (1.LSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1991.PB1-3