[PB1-5] Surface and Gas-Phase Reactions in Selective Tungsten CVD as a Function of the SiH4/WF6 ratio

Yoshitaka Nakamura、Nobuyoshi Kobayashi、Hidekazu Goto、Yoshio Homma (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1991.PB1-5