[PB4-5] Mass Transport Mechanism of Molten Metal in Excimer Laser Induced Plug Formation for Submicron Interconnection

Ryoichi MUKAI、Masako IIZUKA、Hiroshi KUDO、Motoo NAKANO (1.Fujitsu Limited, Advanced Technology Division)

https://doi.org/10.7567/SSDM.1991.PB4-5