[PB4-7] A Novel Method of Reliable Formation of Wide Bandgap Microcrystalline Emitter for Si-HBT by a-SiC Modification

K. SASAKI、K. YOSHIDA、T. MIYAJIMA、S. FURUKAWA (1.Department of Applied Electronics, Graduate School of Science and Engineering, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1991.PB4-7