[PB6-1] Fluoride Buffer Layer Relaxing the Stress of GaAs on Si and Its Effects

Masahiro UCHIGOSHI, Kazuo TSUTSUI, Seijiro FURUKAWA (1.Dept. of Applied Electronics, Graduate School of Science and Engineering, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1991.PB6-1