[PB6-7] Bi12SiO20 Electro-Optic Thin Films Deposited on Sapphire by ECR Plasma Sputtering

Koji NOMURA、Hisahito OGAWA (1.Matsushita Electric Industrial Company, Limited, Central Research Laboratories)

https://doi.org/10.7567/SSDM.1991.PB6-7