Direct Analysis for the Contamination in Contact and Via Holes Using Thermal Desorption Spectroscopy

Hidemitsu Aoki; Eiji Ikawa; Takamaro Kikkawa; Yuden Teraoka; Iwao Nishiyama

doi:https://doi.org/10.7567/SSDM.1991.PB7-4

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜 1991年8月29日
Pacifico Yokohama, Yokohama, Japan

[PB7-4] Direct Analysis for the Contamination in Contact and Via Holes Using Thermal Desorption Spectroscopy

Hidemitsu Aoki、Eiji Ikawa、Takamaro Kikkawa、Yuden Teraoka、Iwao Nishiyama (1.Microelectronics Research Labs, NEC Corp.、2.Opto-electronics Research Labs, NEC Corp.)

https://doi.org/10.7567/SSDM.1991.PB7-4

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