[PB7-4] Direct Analysis for the Contamination in Contact and Via Holes Using Thermal Desorption Spectroscopy

Hidemitsu Aoki, Eiji Ikawa, Takamaro Kikkawa, Yuden Teraoka, Iwao Nishiyama (1.Microelectronics Research Labs, NEC Corp., 2.Opto-electronics Research Labs, NEC Corp.)

https://doi.org/10.7567/SSDM.1991.PB7-4