The Japan Society of Applied Physics

[PB7-6] Behavior of Wafer SMD (Surface Micro Defect) as a Origin of Oxide Breakdown

Moriya MIYASHITA、Hiroyuki FUKUI、Atsuko KUBOTA、Shuichi SAMATA、Hachiro HIRATSUKA、Yoshiaki MATSUSHITA (1.Semiconductor Materials Engineering Dept. Toshiba Corporation)

https://doi.org/10.7567/SSDM.1991.PB7-6