The Japan Society of Applied Physics

[PB7-8] Infrared Characterization of SiO2 Ultra Thin Film by Grazing Internal Reflection

Masanori OKUYAMA, Yuichi MATSUI, Yasuo MIYAGAWA, Yoshihiro HAMAKAWA (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1991.PB7-8