[PB7-8] Infrared Characterization of SiO2 Ultra Thin Film by Grazing Internal Reflection
Masanori OKUYAMA, Yuichi MATSUI, Yasuo MIYAGAWA, Yoshihiro HAMAKAWA
(1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)
https://doi.org/10.7567/SSDM.1991.PB7-8