[PC5-9] High Mobility Botton-Gate Thin-Film Transistors with Laser-Crystallized and Hydrogen Radical Annealed Polysilicon Films

Kazuhiro SHIMIZU、Hideki HOSOYA、Osamu SUGIURA、Masakiyo MATSUMURA (1.Department of Physical Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1991.PC5-9