[PC7-L4] Fabrication of Sub-100 nm Wires in GaAs/AlGaAs Multiquantum Well by Focused Ion Beam Lithography

H. Arimoto、H. Kitada、A. Tackeuchi、A. Endho、Y. Yamaguchi、S. Muto (1.FUJITSU LABORATORIES LTD.)

https://doi.org/10.7567/SSDM.1991.PC7-L4