Excimer Laser Annealed poly-Si TFTs for CMOS Circuits

K. Sera; H. Asada; F. Okumura; H. Tanabe; K. Nakamura; A. Tada; S. Kaneko

doi:https://doi.org/10.7567/SSDM.1991.S-A-5

1991 International Conference on Solid State Devices and Materials

Aug 27, 1991 - Aug 29, 1991
Pacifico Yokohama, Yokohama, Japan

[S-A-5] Excimer Laser Annealed poly-Si TFTs for CMOS Circuits

K. Sera, H. Asada, F. Okumura, H. Tanabe, K. Nakamura, A. Tada, S. Kaneko (1.Functional Devices Research Laboratories Opto-Electronics Research Laboratories NEC Corporation)

https://doi.org/10.7567/SSDM.1991.S-A-5

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