[S-C-8] In-situ Characterization of the Initial Growth Stage of GaAs on Si by Coaxial Impact-Collision Ion Scattering Spectroscopy
Akihiro HASHIMOTO、Naoharu SUGIYAMA、Masao TAMURA
(1.Optoelectronics Technology Research Laboratory、2.Research and Development Center, Toshiba Corporation)
https://doi.org/10.7567/SSDM.1991.S-C-8