[S-D-7] Single-Target Sputtering Process for PZT Thin Films with Precise Composition Control

Kazuyoshi Torii, Toru Kaga, Keiko Kushida, Hiroshi Takeuchi, Eiji Takeda (1.Central Research Lab., Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1991.S-D-7