[S-D-7] Single-Target Sputtering Process for PZT Thin Films with Precise Composition Control Kazuyoshi Torii、Toru Kaga、Keiko Kushida、Hiroshi Takeuchi、Eiji Takeda (1.Central Research Lab., Hitachi Ltd.) https://doi.org/10.7567/SSDM.1991.S-D-7
