[S-D-8] Effect of Oxygen Addition on Structure and Current Conduction Mechanism of Amorphous and Crystallized Extremely Thin CVD-Ta2O5 Films

Hiroshi Shinriki、Masahiko Hiratani、Asao Nakao、Shinichi Tachi (1.Central Research Laboratory, Hitachi Ltd.、2.Production Engineering research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1991.S-D-8