Dislocation Engineering for Silicon Devices

J. S. Custer; J. R. Liefting; R. J. Schreutelkamp; R. C. M. Wijburg; H. Wallinga; F. W. Saris

doi:https://doi.org/10.7567/SSDM.1992.A-2-4

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜 1992年8月28日
Tsukuba Center Building, Tsukuba, Japan

[A-2-4] Dislocation Engineering for Silicon Devices

J. S. Custer、J. R. Liefting、R. J. Schreutelkamp、R. C. M. Wijburg、H. Wallinga、F. W. Saris (1.FOM Institute for Atomic and Molecular Physics、2.University of Twente, MESA Research Institute、3.IMEC vzw)

https://doi.org/10.7567/SSDM.1992.A-2-4

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