The Japan Society of Applied Physics

[A-2-4] Dislocation Engineering for Silicon Devices

J. S. Custer, J. R. Liefting, R. J. Schreutelkamp, R. C. M. Wijburg, H. Wallinga, F. W. Saris (1.FOM Institute for Atomic and Molecular Physics, 2.University of Twente, MESA Research Institute, 3.IMEC vzw)

https://doi.org/10.7567/SSDM.1992.A-2-4