[B-2-5] Phosphorus-Implanted Polysilicon Emitters with High Emitter Efficiency

A. Pruijmboom、W. T. A. van den Einden、D. B. M. Klaassen、J. W. Slotboom、G. Streutker、A. E. M. de Veirman、P. C. Zalm (1.Philips Research Laboratories)

https://doi.org/10.7567/SSDM.1992.B-2-5