Phosphorus-Implanted Polysilicon Emitters with High Emitter Efficiency

A. Pruijmboom; W. T. A. van den Einden; D. B. M. Klaassen; J. W. Slotboom; G. Streutker; A. E. M. de Veirman; P. C. Zalm

doi:https://doi.org/10.7567/SSDM.1992.B-2-5

1992 International Conference on Solid State Devices and Materials

Aug 26, 1992 - Aug 28, 1992
Tsukuba Center Building, Tsukuba, Japan

[B-2-5] Phosphorus-Implanted Polysilicon Emitters with High Emitter Efficiency

A. Pruijmboom, W. T. A. van den Einden, D. B. M. Klaassen, J. W. Slotboom, G. Streutker, A. E. M. de Veirman, P. C. Zalm (1.Philips Research Laboratories)

https://doi.org/10.7567/SSDM.1992.B-2-5

▲