[B-6-3] Threading Dislocation Reduction in InP/GaAs by Thin Strained Interlayer and Its Application to the Fabrication of 1.3 μm Wavelength Laser on GaAs

Yae OKUNO, Toshihiro KAWANO, Tomonobu TSUCHIYA, Tsuyoshi TANIWATARI (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1992.B-6-3