[B-6-3] Threading Dislocation Reduction in InP/GaAs by Thin Strained Interlayer and Its Application to the Fabrication of 1.3 μm Wavelength Laser on GaAs

Yae OKUNO、Toshihiro KAWANO、Tomonobu TSUCHIYA、Tsuyoshi TANIWATARI (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1992.B-6-3