[LD-8] The Effects of Polishing Damages and Oxygen Concentrations on Thin Gate Oxide Integrity (TOI)

Takao Abe, Yuichi Kato (1.Shin-Etsu Handotai, 2.SEIKO Instruments, Takatsuka Units)

https://doi.org/10.7567/SSDM.1992.LD-8