[PD2-L11] Angle Resolved X-Ray Photoelectron Spectroscopy Study of Ultrathin N2O Oxides

J. Ahn、M. Arendt、J. M. White、D. L. Kwong (1.Microelectronics Research Center, The University of Texas at Austin)

https://doi.org/10.7567/SSDM.1992.PD2-L11