[PD3-6] Fabrications and Bonding Strengths of Bonded Silicon-Quartz Wafers

Takao ABE, Atsuo UCHIYAMA, Katsuo YOSHIZAWA, Yasuyuki NAKAZATO (1.Shin-Etsu Handotai and, 2.Nagano Denshi)

https://doi.org/10.7567/SSDM.1992.PD3-6