[PD3-6] Fabrications and Bonding Strengths of Bonded Silicon-Quartz Wafers Takao ABE、Atsuo UCHIYAMA、Katsuo YOSHIZAWA、Yasuyuki NAKAZATO (1.Shin-Etsu Handotai and、2.Nagano Denshi) https://doi.org/10.7567/SSDM.1992.PD3-6
