Low Defect Density Low Stress GaAs Grown on Undercut GaAs on Si

Naoki WADA; Shinichi YOSHIMI; Masamichi SHIGEKANE; Shiro SAKAI; Yoshihiro SHINTANI; Masuo FUKUI

doi:https://doi.org/10.7567/SSDM.1992.S-II-10

[S-II-10] Low Defect Density Low Stress GaAs Grown on Undercut GaAs on Si

Naoki WADA, Shinichi YOSHIMI, Masamichi SHIGEKANE, Shiro SAKAI, Yoshihiro SHINTANI, Masuo FUKUI (1.Department of Electrical and Electronic Engineering, Tokushima University, 2.Department of Electronics, Technical College, Tokushima University)

https://doi.org/10.7567/SSDM.1992.S-II-10

1992 International Conference on Solid State Devices and Materials

[S-II-10] Low Defect Density Low Stress GaAs Grown on Undercut GaAs on Si