[S-II-3] Critical Thickness of Heteroepitaxial Si1-xGex/Si Layers as Studied by Atomic Force Microscopy
Toshiyuki NAKAMURA、Morifumi OHNO、Kinya ASHIKAGA、Seigo OHNO
(1.Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1992.S-II-3