[S-II-5] Effect of Dislocation Networks at SLS Interfaces on the Reduction of Threading Dislocations in GaAs/Si

Akiyoshi Tachikawa、Aiji Jono、Takashi Aigo、Akihiro Moritani (1.Electronics Research Laboratories, Nippon Steel Corp.)

https://doi.org/10.7567/SSDM.1992.S-II-5