Impact of Contact Resistance and Junction Capacitance on the Switching Performance in Scaled 0.1μm CMOS Devices

[A-2-5] Impact of Contact Resistance and Junction Capacitance on the Switching Performance in Scaled 0.1μm CMOS Devices

Satoshi Inaba、Tomohisa Mizuno、Masao Iwase、Hiromi Niiyama、Makoto Yoshimi、Akira Toriumi (1.ULSI Research Laboratories, R&D Center, Toshiba Corporation)